Eur. Phys. J. Special Topics 144, 41-49 (2007)
https://doi.org/10.1140/epjst/e2007-00107-x
https://doi.org/10.1140/epjst/e2007-00107-x
A high-resolution XUV-spectrometer for the study of laser-produced plasmas as light sources for lithography
UCD School of Physics, University College Dublin, Belfield, 4000 Dublin, Ireland
A 
grazing incidence vacuumspectrograph is converted to a
spectrometer to use photo-electric detection.
The detector used is a CCD-camera with special enhanced sensitivity
for the soft x-ray region.
The camera can be moved along a special designed rail which allows
very accurate repositioning after initial calibration.
We designed a procedure for alignment, which allows us to align and
focus the spectrometer using only visible light.
This simplifies and improves setting up the instrument.
© EDP Sciences, Springer-Verlag, 2007
