Eur. Phys. J. Special Topics 144, 41-49 (2007)
https://doi.org/10.1140/epjst/e2007-00107-x

A high-resolution XUV-spectrometer for the study of laser-produced plasmas as light sources for lithography

UCD School of Physics, University College Dublin, Belfield, 4000 Dublin, Ireland

Abstract

A grazing incidence vacuumspectrograph is converted to a spectrometer to use photo-electric detection. The detector used is a CCD-camera with special enhanced sensitivity for the soft x-ray region. The camera can be moved along a special designed rail which allows very accurate repositioning after initial calibration. We designed a procedure for alignment, which allows us to align and focus the spectrometer using only visible light. This simplifies and improves setting up the instrument.