ZnO sensing structure for NH3 detection
Institute of Electron Technology, Warsaw, Poland
2 Department of Optoelectronics at Faculty of Mathematics and Physics Silesian University of Technology, Gliwice, Poland
Layered structure for the detection and measuring of gaseous ammonia have been presented. The presented sensor structures hale Bern developed on the base of thin ZnO and Au/Cr layers deposited on a glass substrate. The technological as well as optical properties of the elaborated sensing structures have been discussed.
© EDP Sciences, Springer-Verlag, 2008