Investigation of the ZnO sensing structure on NH3 action by means of the surface plasmon resonance method
Department of Optoelectronics at Faculty of Mathematics and Physics Silesian University of Technology, Gliwice, Poland
2 Institute of Electron Technology, Warsaw, Poland
The paper presents the results of experimental investigations of the layered Zn/Au/Cr sensor structure, which permits to detect and to measure the concentration of gaseous ammonia NH3. The elaborated sensor structure is deposited on BK7 glass substrate. The substrate with the layered sensor structure is coupled with the prism, and the whole constitutes the optical plasmon systems SPR of the ammonia sensor. The sensor is characterized by a short response time and a comparatively good regeneration of its sensing properties.
© EDP Sciences, Springer-Verlag, 2008