https://doi.org/10.1140/epjst/e2008-00682-2
Manufacturing technology for the fabrication a discrete actuator using a magnetic shape memory alloy
Institute for Microtechnology (imt), Center for Production Technology, Leibniz Universitaet Hannover, An der Universitaet 2, 30823 Garbsen, Germany
To demonstrate the feasibility of combining thin-film fabrication techniques and discrete MSM stripes, a hybrid actuator system was designed. The actuator system consists of four thin-film stators and two discrete MSM stripes mounted in a row. For creating an actuator motion, one of the MSM stripes has to be excited by a pair of stators to cause variant switching. This results in an elongation plus a compression of the second stripe and vice versa. The technologies required for fabricating the thin-film stator are sputter deposition, PECVD, electroplating, etching, and photolithography. This paper describes the fabrication process for a thin-film stator used for the MSM micro actuator system. It also presents technology study results indicating the feasibility of the planned fabrication sequence.
© EDP Sciences, Springer-Verlag, 2008
