Eur. Phys. J. Special Topics 199, 101-110 (2011)
https://doi.org/10.1140/epjst/e2011-01506-0

Regular Article

Laser micro- and nanostructuring using femtosecond Bessel beams

¹ CNISM and Dipartimento di Fisica e Matematica, Università dell’Insubria, via Valleggio 11, 22100 Como, Italy
² Département d’Optique P. M. Duffieux, Institut FEMTO-ST, UMR 6174, CNRS - Université de Franche-Comté, 16 route de Gray, 25030 Besançon Cedex, France
³ INRS-EMT, University of Quebec, 1650, Boul. Lionel-Boulet, Varennes, Quebec, Canada J3X1S2
⁴ Nanophotonics Research Alliance, Universiti Teknologi Malaysia, 81310 Skudai, Johor, Malaysia
⁵ Dipartimento di Scienze Chimiche e Ambientali, Università dell’Insubria, via Valleggio 11, 22100 Como, Italy

^a e-mail: manoj.femto@gmail.com
^b e-mail: john.dudley@univ-fcomte.fr

Received: 29 August 2011
Revised: 4 October 2011
Published online: 7 December 2011

Abstract

We report the generation of femtosecond Bessel beams of conical half-angle 26 degrees using an axicon lens and a beam reduction imaging setup. The generated Bessel beams were applied to the micromachining of nanostructures in glass of length up to 100 μm. The effect of the incident pulse energy on the characteristics of the nano- structures was studied using optical microscopy.