Conformal coating by liquid route on three-dimensional topology
GREMAN-IUT de Blois, 15 rue de la Chocolaterie, 41000, Blois Cedex, France
2 GREMI, CNRS/Université d’Orléans, 14 rue d’Issoudun, 45067, Orléans, France
3 Plateforme IBiSA de Microscopie Electronique, Université de Tours, BP 3223, 10 bd Tonnellé, 37032, Tours Cedex, France
Accepted: 9 April 2022
Published online: 9 May 2022
We demonstrated a new approach to the production of three-dimensional-coated patterns using the liquid route. Metallic perovskite oxides were coated onto three-dimensional (3D) micro-structured substrates with different aspect ratios. The method’s success relies on the solution viscosity being adjusted by adding viscous liquid. The process of oxide thin films follows three stages: preparing the precursor solution, coating the solution by spin-coating process onto three-dimensional-Si substrates, and post-annealing. Chemical solution 3D-coating is conformal.
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