https://doi.org/10.1140/epjs/s11734-024-01433-7
Regular Article
Structural evolution of high temperature annealed single-crystalline AlN on SiC substrate
1
Laboratory of Functional Soft Condensed Matter, School of Material and Energy, Guangdong University of Technology, 510006, Guangzhou, People’s Republic of China
2
Songshan Lake Materials Laboratory, 523808, Dongguan, Guangdong, People’s Republic of China
3
International School of Microelectronics, Dongguan University of Technology, 523808, Dongguan, Guangdong, People’s Republic of China
a
yuanye@sslab.org.cn
b
zhaoyu@gdut.edu.cn
Received:
28
September
2024
Accepted:
25
November
2024
Published online:
12
December
2024
This article has no abstract.
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© The Author(s), under exclusive licence to EDP Sciences, Springer-Verlag GmbH Germany, part of Springer Nature 2024
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
