https://doi.org/10.1140/epjst/e2009-00930-y
Real-time studies of thin film growth: Measurement and analysis of X-ray growth oscillations beyond the anti-Bragg point
1
Universität Tübingen, Institut für Angewandte Physik, 72076 Tübingen, Germany
2
Oxford University, Physical and Theoretical Chemistry, Oxford, OX1 3QZ, UK
Monitoring X-ray growth oscillations, i.e. temporal oscillations of the
X-ray reflectivity during thin film growth, is an important technique for
in-situ and real-time characterization of heteroepitaxy. Here we demonstrate the
simultaneous acquisition and analysis of not only one, but a set of growth
oscillations in a wide range of the reciprocal space (q-space). Importantly,
the combined information of these growth oscillations removes ambiguities
inherent in the analysis of a single (anti-Bragg) oscillation. Wide
q-range measurements also enlarge the accessible parameter range in film
thickness and roughness, as measurements at optimized q-values exhibit a
larger amplitude and lower damping during growth. As an example we analyze
oscillations at 
, 
, 
during molecular beam deposition of the organic semiconductor diindenoperylene using kinematic scattering theory. From this
we derive the growth mode and the surface roughening with film thickness.
© EDP Sciences, Springer-Verlag, 2009
