CNRS – LPN, Route de Nozay, 91460 Marcoussis, France
The main techniques to produce objects of size smaller than 100 nm are reviewed in this paper. For each process, the principle of the technique, the operating procedure and the resolution are presented. The review is restricted to the so called down-techniques. The bottom-up techniques using self organization, selective epitaxy and other chemistry like processes are not covered.
© EDP Sciences, Springer-Verlag, 2009