https://doi.org/10.1140/epjs/s11734-024-01390-1
Regular Article
Enabling DUV polarization detection with isotropic amorphous gallium oxide
1
School of Physics, Hubei University, 430062, Wuhan, Hubei, People’s Republic of China
2
Songshan Lake Materials Laboratory, 523808, Dongguan, Guangdong, People’s Republic of China
3
School of Physics and Optoelectronic Engineering, Shandong University of Technology, 255000, Zibo, Shandong, People’s Republic of China
4
Institute of Physics, Chinese Academy of Sciences, 100190, Beijing, People’s Republic of China
5
Quantum Science Center of Guangdong-Hong Kong-Macao Greater Bay Area, 518045, Shenzhen, Guangdong, People’s Republic of China
b
yhzhang@sdut.edu.cn
e
xnwang2006@hotmail.com
g
zxmei@iphy.ac.cn
Received:
10
August
2024
Accepted:
26
October
2024
Published online:
14
November
2024
Polarization detection technology has emerged as a pivotal research frontier in modern optoelectronic information science, yet polarization sensing of ultraviolet (UV) light, particularly in the deep UV (DUV) range, remains elusive due to the scarcity of suitable ultra-wide bandgap materials. To address this gap, we introduce a highly sensitive polarization detector for deep UV radiation, leveraging sub-wavelength metal gratings integrated with amorphous gallium oxide (a-Ga2O3). Our approach yields a remarkable extinction ratio of 21.49, achieved through integrating with a periodic Au grating structure (pitch: 167 nm, width: 100 nm, spacing: 67 nm, height: 40 nm) by focused ion beam (FIB). Finite-difference time-domain (FDTD) simulations confirm the remarkable polarization filtering capabilities of these gratings, revealing a distinct transmission disparity, with perpendicularly polarized light transmitting 2.22 times as much as parallel polarized light. This work not only expands the utility of a-Ga2O3 in the realm of DUV polarization detection but also showcases an efficacious strategy for achieving polarization sensitivity, even with isotropic amorphous materials.
Supplementary Information The online version contains supplementary material available at https://doi.org/10.1140/epjs/s11734-024-01390-1.
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