https://doi.org/10.1140/epjs/s11734-024-01430-w
Regular Article
Design of high-frequency surface acoustic wave resonators based on Al0.8Sc0.2N/AlN/Sapphire multilayer structure
1
School of Software & Microelectronics, Peking University, 102600, Beijing, China
2
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, 315201, Ningbo, China
3
School of Integrated Circuits, Peking University, 100091, Beijing, China
a
guowei@nimte.ac.cn
b
wangjinyan@pku.edu.cn
c
jichun.ye@nimte.ac.cn
Received:
29
September
2024
Accepted:
25
November
2024
Published online:
9
December
2024
This article has no abstract.
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© The Author(s), under exclusive licence to EDP Sciences, Springer-Verlag GmbH Germany, part of Springer Nature 2024
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
